Semenovskaya, E.V., Lyahova N.М., Osinskii, V.I., Suhoviy N.О., Faleeva, E.M. and Timofeyev, V.I. 2015. Modeling of templet nanostructures. Electronics and Communications. 19, 5 (Mar. 2015), 32–36. DOI:https://doi.org/10.20535/2312-1807.2014.19.5.38788.