Methodology for modeling the transportation of short-focus electron beams in an equipotential channel taking into account spread of electron thermal velocities
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Abstract
The methodic of simulation of guiding short-focus electron beams, formed by glow discharge electron guns, from soft to high vacuum region in equipotential channel, is analyzed in the article. Calculations have been provided with taking into account influence of thermal electrons velocity dissipation into quality of guiding beam focusing. Algorithm of optimizing of beam guiding system on point of view providing necessary pressure difference in discharge and technological chamber with minimal beam current losses in the channels’ wall have been proposed. The main particularrity of elaborated optimization algorithm is providing the start steps of calculations without taking into account dissipation of thermal electrons velocity, which allow reducing the time of solving optimization task, and after that introduced necessary disturbance for estimation of influence of dissipation of thermal velocity. Test calculations are shown, that proposed numerical algorithm is robust for all used range of simulation parameters. Obtained calculation data are confirmed experimentally, difference between theoretical and experimental data was smaller then 15%.
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