Optical biosensors on multilayer thin-film structures
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Abstract
Optical biosensors based on the damped field usually applying for investigation of biochemical processes in thin layer abutting to the film with exited field oscillations. In this paper modeling of metal-clad waveguide sensor basing on the thin film Al–Nb2O5 and developing of it’s technology using vacuum deposition and liquid anodization control method are descrybed. Obtained sensors have sensitivity near to the traditionally using in this field surface plasmon resonance sensors.
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