Micromechanical non - intrusive thermal resistive sensor of fluid velocity into a rectangular cross-section flow channel
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Abstract
An analytical model of a non-intrusive micro-electro-mechanical (MEMS) thermal sensor into a rectangular cross-section flow channel is presented and investigated. The analytical expressions for temperature distribution are obtained and numerical values are calculated for a MEMS structures included three-element thermally isolated thin film resistors at a SiO2/Si3N4 dielectric membrane. The model includes the heat exchange from the both frontal and opposite membrane sides and is applicable for gas or liquid flow velocity measurements. The sensor and channel structural design features and materials thermal properties are taken into accounts into the model. The DC heating operations are analyzed including the both constant power dissipation and constant heater temperature modes.
References 23, tables 3, figures 3.
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