Principles of building mathematical models beam-type microelectromechanical resonators
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Abstract
In this paper the mathematical model of the bar MEMS resonator is given. The details are also described in physical state of the MEMS resonator, calculation procedures based on the mechanical and electrical theories are given. It is shown that the frequency dependence of MEMS resonator characteristics is defined by the polarized ferroelectric material of the moving bar part particles displacement. Calculation methods for longitudinal component of the displacement vector of the MEMS bar resonator moving part is described including bar support foot responses
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