High-pressure plasma system with microstructured electrodes. First 1. Physical basis of generating non-thermal plasma at atmospheric pressure
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Abstract
Physical basis of generating non-thermal equilibrium plasma at atmospheric pressure are considered in this paper. It is shown that such a plasma can be obtained the most preferable in systems with microstructured electrodes, this makes it possible to distribute the discharge over the discharge gap and to increase the uniformity of the plasma. But also important is to obtain a stable plasma volume, so the paper also deals with the methods of stabilizing gas discharges by the form of the supply voltage and the discharge gap purge working gas.
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