Investigation of electron-optics characteristics of triode gas discharge electron gun with cold cathode
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Abstract
Results of computer simulating of two channel control system of a technological triode high-voltage glow-discharge electron-beam gun in the pulse-mode are considered.
With a purpose of creation adequate model there were the experimentally got parameters of the real devices which are included in technological equipment. The parameters of control system were got as a result and were used for creation of experimental prototype. Experimental investigation of its operation was also done.
Offered control system of electronic beam parameters of technological triode gas discharge gun of high-voltage glow-discharge allowed to provide the technological process of overcoating from Al2O3 in the pulse-mode with high-performance quality and can be used for the other technological operations with impulsive gas discharge electronogens.
References 7, figures 7
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