Cluster model of the formation of aluminum nitride in alumina nanoreactors
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Abstract
The non-traditional method of obtainingclusters of heterogenous and homogenous nanooxides, nitrides of aluminum by substitution ofoxygen atoms with low-energy nitrogen ions inthe solid phase inside the nanopores of aluminum oxide Al2O3 (nanosapfire) is proposed and implemented. The AlN, AlNxO1-x, Al2O3 nanolayers was experimentally obtained
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References
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