Methods of obtaining and studying the morphology of porous layers p-InP and p-GaAs

Main Article Content

YA.O. Sychikova
V.V. Kidalov
G.O. Sukach
O.I. Kyrylash

Abstract

Porous layers of p-type GaAs have been obtained by a method electrochemical etchings. The methods of X-ray photoelectron spectroscopy (XPS), energy dispersive analysis of Xrays (EDAX) and diffractometer had been defined presence of oxide. For the first time by the method of photoelectrochemical etching porous layers of p-type InP with a pore size 30- 40 nm have been obtained, the thickness of the porous layer is 20 microns

Article Details

How to Cite
Sychikova, Y., Kidalov, V. ., Sukach, G., & Kyrylash, O. . (2010). Methods of obtaining and studying the morphology of porous layers p-InP and p-GaAs. Electronics and Communications, 15(4), 34–36. https://doi.org/10.20535/2312-1807.2010.15.4.299703
Section
Solid-state electronics

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