Application of pulsed magnetron sputtering for obtaining optical meta-coatings with longitudinal nanogradient refractive index
Main Article Content
Abstract
Classification of optical metacoatings and expedience of applying the magnetron sputtering to its obtaining are considered. Perspectivity of applying the pulse (mid-frequency) reactive magnetron sputtering to obtaining optical coatings with longitudinal nanogradient index of refraction is shown, this is confirmed by the manufacturing of antireflective coating with good properties for laser technique
Article Details
This work is licensed under a Creative Commons Attribution 4.0 International License.
Authors who publish with this journal agree to the following terms:- Authors retain copyright and grant the journal right of first publication with the work simultaneously licensed under a Creative Commons Attribution License that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.
- Authors are able to enter into separate, additional contractual arrangements for the non-exclusive distribution of the journal's published version of the work (e.g., post it to an institutional repository or publish it in a book), with an acknowledgement of its initial publication in this journal.
- Authors are permitted and encouraged to post their work online (e.g., in institutional repositories or on their website) prior to and during the submission process, as it can lead to productive exchanges, as well as earlier and greater citation of published work (See The Effect of Open Access).
References
E. Ozbay, “The Magical World of Photonic Metamaterials”, Optics and Photonics News, vol. 19, no. 11, p. 22, Nov. 2008. DOI:10.1364/OPN.19.11.000022
O. Volpyan, A. Kuzmichev, and A. Samokish, “Modern optical film coatings”, Electronics and communications, vol. 46, no. 5, pp. 5–19, 2008.
O. Volpyan and A. Kuzmichev, “Experience of applying optical laser coatings by magnetron method. Problem of obtaining gradient coatings”, in In: Proc. III Int. scientific-technical. conf. “Vacuumengineering , materials and technology”, 2008, pp. 42–43.
E. Konyukhova, A. Kuzmichev, Y. Obod, O. Volpian, and P. Yakovlev, “Optical metacoatingson the base of nanogradient reactivemagnetron sputtered thin dielectric layer”, in Abstracts of Int. Workshop on Optics, Photonicsand Metamaterials “OPAM-2009”, 2009, pp. 27–28.
M. Born and E. Wolf, Fundamentals of Optics, Moscow: Science, 1973, p. 856.
C. Gomez-Reino, M. V. Perez, and C. Bao, Berlin, Heidelberg: Springer Berlin Heidelberg, 2002. DOI:10.1007/978-3-662-04741-5
L. Gubanova, Gradient interference systems, Abstract of dissertation for the degree of Doctor of Technical Sciences, St. Petersburg, 2008, p.48
E. Yablonovitch, “Photonic crystals: what’s in aname”, Opt. and Photonic News, no. 3, pp. 12–13, 2007.
A. Belyanin, E. Grebennikov, V. Zhitkovsky, and M. Samoylovich, Nanomaterials. III. Photonic crystals and nanocomposites based on opal matrices, Moscow: TsNITI “Tekhnomash”, 2007, p. 299.
A. Boltasseva and V. M. Shalaev, “Fabrication of optical negative-index metamaterials: Recent advances and outlook”, Metamaterials, vol. 2, no. 1, pp. 1–17, May 2008. DOI:10.1016/j.metmat.2008.03.004
O. Volpyan and A. Kuzmichev, “Issues of technology of nanostructured photonic metamaterials”, Electronics and communications, no. 2-3, pp. 50–55, 2009.
A. Shvartsburg, M. Agranat, and O. Chefonov, “Nano-optics of gradient dielectric films”, Quantum Electronics, vol. 39, no. 10, pp. 948–952, 2009.
D. R. Smith, J. J. Mock, A. F. Starr, and D. Schurig, “Gradient index metamaterials”, Physical Review E, vol. 71, no. 3, Mar. 2005. DOI:10.1103/PhysRevE.71.036609
O. Volpyan and A. Kuzmichev, “Increasing the efficiency of ion technology of optical coatings using pulsed magnetron sputtering systems with a secondary emission cathode”, Electronics and Communications, no. 4, pp. 29–35, 2007.
O. Volpyan, A. Kuzmichev, Y. Obod, and P. Yakovlev, “Obtaining optical nanogradient metacoatings by reactive magnetron sputtering”, in Proc. 15th Int. Conf. “High Technologies in Russian Industry – Materials and Devices for Functional Electronics and Microphotonics” and 22nd Int. Symp. “Thin Films in Electronics”, 2009, pp. 447–450.
