High-pressure plasma system with microstructured electrodes. Part 2. Design of microstructured electrode systems for the generation of non-thermal equilibrium plasma at atmospheric pressure

Main Article Content

R. Y. Chaplinskiy
Anatoly Ivanovitch Kuzmichev

Abstract

This paper is describe the design and features of microstructured electrode systems, such as: a system for generating multicorona discharge, system in the form of a honeycomb, a sawtooth electrode system and a system for generating a coplanar barrier discharge, a system for generating a capillary discharge, a system for generating microstructured hollow cathode discharge, system for generating a plasma flow under atmospheric pressure and a systems with plasma electrodes. The paper is also discuss a potential applications of such systems. References 25, figures 9, Table 1

Article Details

How to Cite
Chaplinskiy, R. Y., & Kuzmichev, A. I. (2014). High-pressure plasma system with microstructured electrodes. Part 2. Design of microstructured electrode systems for the generation of non-thermal equilibrium plasma at atmospheric pressure. Electronics and Communications, 19(4), 36–44. https://doi.org/10.20535/2312-1807.2014.19.4.35530
Section
Vacuum, plasma and quantum electronics

References

Akishev Yu.S., Aponin G.I., Karal'nik V.B., Monich A.E., Trushkin N.I. (2004), “Phenomenology of a high-current negative point-to-plane corona in nitrogen”. Plasma Physics Reports. Vol. 30, no. 9, pр. 779-787.

Antoniuk D.M., Seguin H.J.J., Capjack C.E. (1984), “Electrode design for a magnetically stabilized glow discharge”. Appl. Phys. B. Vol. 35, pp 155-162.

Becker K. H., Kogelschatz U., Barker R. J. and Schoenbach K. H (2004), “Non equilibrium air plasma at atmospheric pressure”. London, IOP Publishing. P. 682.

Fridman A. (2008), “Plasma Chemistry”. New York: Cambridge University Press. P 978.

Jodzis S., Smoli´nski T., Sówka P. (2011), “Ozone Synthesis Under Surface Discharges in Oxygen: Application of a Concentric Actuator”. IEEE Trans. Plasma Sci. Vol. 39, no. 4, pp. 1055-1060

Kaneda S., Hayashi N., Ihara S., Satoh S., Yamabe C. (2004), “Application of dielectric material to double-discharge-type ozonizer”. Vacuum. Vol. 73, pр. 567-571.

Kunhardt E.E. (2000), “Generation of large-volume, atmospheric-pressure, nonequilibrium plasmas”. IEEE Trans. Plasma Sci. Vol. 28, no. 1, pp.189-200.

Muller S., Conrads J., Best W. (2000), “Reactor for decomposing soot and other harmful substances contained in flue gas”. Proc. of Int. Symp. High Pressure Low Temperature Plasma Chemistry (Hakone VII). Vol. 2, pp 340-344.

Park Soo-Ho, Cho Tae-Seung, Becker Kurt H., Kunhardt Erich E (2009), “Capillary plasma electrode discharge as an intense and efficient source of vacuum ultraviolet radiation for plasma display”. IEEE Trans. Plasma Sci. Vol. 37, no. 8, pp.1611-1614.

Penetrante B.M., Brusasco R. M., Merritt B. T., Vogtlin G. E (1999), “Environmental application of low temperature plasmas”. Pure Appl. Chem. Vol. 71, № 10, pp. 1829-1835.

Roth J.C. (2004) “Prospective industrial applications of the one atmosphere uniform glow discharge plasma”. 39th IAS Annual Meeting of Industry Applications Conference.

Rutgers W. R., van Velthaizen E.M. (2000), “Pulsed corona discharge for gas and waste water treatment”. Proc. Int. Conf. HAKONE VII. Vol. 2, pp. 335-339.

Sch¨utze A., Jeong J.Y., Babayan S.E., Park J., Selwyn G.S., Hicks R.F. (1998), “The Atmospheric- Pressure Plasma Jet: A Review and Comparison to Other Plasma Sources”. IEEE Trans. Plasma Sci. Vol. 26, no. 6, pp. 1685-1695.

Schoenbach K.H., EL-Habachi A., Shi W. Ciocca M. (1997), “High-pressure hollow cathode discharges”. Plasma Sources Sci. Technol. Vol. 6, pр. 468-477.

Sobel A. (1991), “Plasma Displays”. IEEE Trans. Plasma Sci. Vol. 19, no. 6, pp.1032-1047.

Wieneke S., Viol W. (2000), “Gas lasers exited by silent discharge”. Proc. Int. Conf. HAKONE VII. Vol.1, pp. 8-12.

Yamada M., Ehara Y., Ito T. (1999) “The influence of saw tooth shaped electrode from on NOx treatment by trenched type discharge reactor”. Papers of Technical Meeting on Electrical Discharges, IEE Japan. Vol. ED-99, pр. 94-108.

Zvereva G. (2002) “Investigation of Kr gas discharge plasma as a possible laser medium”. Proc. Int. Conf. HAKONE IX.

Ukrainian Patent № u201307319.

Kireev V.Yu., Danilin B.S., Kuznetsov V.I. (1983), “Plasma-chemical and ion-chemical etching of microstructures”. Moskva: Radio i sviaz, P. 128. (Rus)

Kruzshanivskiy V.I., Kuzmichev A.I., Chaplinskiy R.Yu. (2010), “Plasma reactors to generate ozone for corona discharge with secondary electron emitters”. Naukovi visti NTUU “KPI”, no. 5, pp. 5-9. (Ukr)

Kuzmichev A.I., Chaplinsky R.Y. (2014) “Plasma high-pressure system with microstructured electrodes. Part One. Physical basis of generating non-thermal plasma at atmospheric pressure”. Electronics and Communications, no 3. (Rus)

Leb L. (1950), “Basic processes of electrical discharges in gases”. Moskva, Leningrad, Hоsudаrstvеnnое izdаtеl’stvо tеоrеtikо-tеkhnichеskоj litеrаtury. P 672. (Rus)

Samoylovich V.G. Gibalov V.I., Kozlov K.V. (1989), Physical chemistry of the barrier discharge, Moscow, Publishing House MSU. P 176.

Filippоv Yu.V., Vоblikоvа V.А., Pаntеlееv V.I. (1987), “Electrosynthesis of ozone” Mоskvа, Izd. MSU. (Rus)