Measurement of the microwave parameters of the dielectric materials by the method of thin dielectric resonator

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Published: Jul 23, 2015
DOI: https://doi.org/10.20535/2312-1807.2015.20.1.38354
Keywords:
semiconductor materials, the loss tangent, the dielectric permittivity, the frequency dependence of losses, the conductivity, the quasi-Debye mechanism

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Віталій Іванович Молчанов
Національний технічний університет України "КПІ"
Валерій Маркович Пашков
Національний технічний університет України "КПІ"
Дмитро Дмитрович Татарчук
Національний технічний університет України "КПІ"
https://orcid.org/0000-0003-1171-6701
Антон Сергійович Франчук
Національний технічний університет України "КПІ"
https://orcid.org/0000-0002-8350-564X

Abstract

The article describes the method of thin dielectric resonator for measuring parameters of microwave dielectric materials, its advantages and disadvantages. It is shown that the proposed method has a high sensitivity and can be used for measuring the dielectric thin films deposited on a substrate. References 7, figures 4.

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How to Cite
Молчанов, В. І., Пашков, В. М., Татарчук, Д. Д., & Франчук, А. С. (2015). Measurement of the microwave parameters of the dielectric materials by the method of thin dielectric resonator. Electronics and Communications, 20(1), 23. https://doi.org/10.20535/2312-1807.2015.20.1.38354
Issue
Vol. 20 No. 1 (2015)
Section
Solid-state electronics
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Author Biography

Дмитро Дмитрович Татарчук, Національний технічний університет України "КПІ"

Кафедра мікроелектроніки, доцент

References

Y.V. Didenko, V.I. Molchanov, V.M. Pashkov, D.D. Tatarchuk, D.A. Shmygin (2014), Microwave methods of measuring the parameters of dielectric materials on the basis of the composite dielectric resonator. Electronics and Communications. Vol. 19. No. 6 (83). Pp. 14-20. (Rus).

Tatarchuk D.D. (2002), Measuring parameters of microwave dielectric materials by the method of EType dielectric resonator. Electronics and Communications. No.14. Pp. 22-23. (Ukr).

V. Pashkov, V. Bovtun, Y. Prokopenko, M. Kempa, V. Molchanov, et al. (2009), Measurement of dielectric films microwave parameters. Microwave & Telecommunication Technology (CriMiCo’2009): Proc. of 19th Int. Crimean Conf. (Sept. 2009, Sevastopol, Ukraine). Sevastopol, Pp. 769–770.

V. Bovtun, V. Pashkov, M. Kempa, S. Kamba, et al. (2011), An electrode-free method of characterizing the microwave dielectric properties of high-permittivity thin films. J. Appl. Phys. Vol. 109. 024106. Pp. 1–6.

V. Bovtun, V. Pashkov, M. Kempa, et al. (2011), Thin dielectric resonatots for microwave characterization of films and substrates. Microwave & Telecom Technology (CriMiCo’2011): Proc. of 21st Int. Crimean Conf. (Sept. 2011, Sevastopol, Ukraine). Sevastopol, Pp. 620–621.

Tatarchuk D.D. (2000), The quality factor of the rectangular combined resonators with E-type oscillations. Sciences. news NTU "KPI". No 2. Pp. 9-12. (Ukr)

V.I. Molchanov, D.D. Tatarchuk. (2008), Inhomogeneities in the microwave dielectric structures. Electronics and Communications. No. 6 (47). Pp. 10-14. (Rus)