Simplified thin film resonator model for high order filters application
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Abstract
The simplified model of thin film piezoelectric resonator based on multiloop equivalent circuits was developed and presented in this work. The model allows the straightforward integration of the resonator’s electrical behavior into the most of modern CAD systems as a part of complex devices and enables the precise evaluation of the output characteristics in a relatively wide frequency range that is especially significant for the modelling of high-order filters composed of thin film bulk acoustic resonators. The model verification was given including: 1) the analysis of the absolute input impedance frequency dependence in wide and narrow frequency ranges; 2) the model agreement examination using different active layer and electrodes materials. An important advantage of proposed solution is the decreasing of calculation time and improving of optimization efficiency of complex RF circuits with a large number of resonators. References 8, figures 12, tables 1.
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