DOI: https://doi.org/10.20535/2523-4455.2018.23.5.141665

Сенсори на польових та фототранзисторах з металевими наночастинками та пористим кремнієм

Oksana Yuriivna Kutova, Tetyana Yuriivna Obukhova, Mykhailo Hryhorovych Dusheiko, Bogdan Oleksiyovych Loboda, Tetyana Ivanivna Borodinova, Serhii Viktorovych Tkach

Анотація


В статті досліджуються два типи сенсорів перекису водню – на основі польового транзистора та на основі фото транзистора. В обох випадках чутлива область розташовувалась на тильній стороні кремнієвої підкладки і складалася з шару пористого кремнію з наночастинками металів (платини або срібла). Пористий шар отримувався шляхом хімічного травлення в присутності металів. Сенсори з пористим кремнієм демонструють достатню чутливість в обох конфігураціях. Польова структура є більш керованою, проте має нижчу чутливість (8 μA/%), тоді як фототранзисторна структура є більш простою та чутливою (до 500 μA/%). Використання срібних та платинових наночастинок зменшує час відгуку сенсора до 2-3 хвилин.

Бібл. 21, рис. 15.


Ключові слова


пористий кремній; МДН-транзистор; фототранзистор; наночастинки срібла; наночастинки платини

Повний текст:

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Посилання


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M.V. Chursanova, L.P. Germash, V.O. Yukhymchuk, V.M. Dzhagan, I.A. Khodasevich, D. Cojoc “Optimization of porous silicon preparation technology for SERS applications” Applied Surface Science vol. 256, pp.3369–3373, 2010 DOI: 10.1016/j.apsusc.2009.12.036

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Ali A. Ensafi, Fatemeh Rezaloo, B. Rezaei, Electrochemical sensor based on porous silicon/silver nanocomposite for the determination of hydrogen peroxide Sensors and Actuators B: Chemical, vol. 231, pp. 239-244, 2016, DOI: 10.1016/j.snb.2016.03.018

Ensafi, M. Mokhtari Abarghoui, B. Rezaei, Electrochemical determination of hydrogen peroxide using copper/porous silicon based non-enzymatic sensor // Sensors and Actuators B: Chemical, vol. 196, pp. 398-405, 2014 DOI: 10.1016/j.snb.2014.02.028

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O. Kutova, M. Dusheiko, T. Obukhova, V. Tymofeev, N. Maksimchuk, T. Borodinova “H2O2 sensor based on FET with active layer in substrate area” Sensor Electronics and Microsystem Technologies, vol 14, No 4, pp 5-12, 2017

V. Estela-Lupis, T. Borodinova, I. Urkova “Extracellular biomineralization and gold and platinum nano- and microcrystallytes synthesis in polysaccharides wather solutions” in Colloid-chemical basis of nanoscience Kyiv: Akademperiodika, 2005.

C. Chartier, S. Bastide, C. Levy-Clement “Metal-assisted wet chemical etching of crystalline silicon” Proceedings of the 22nd European Photovoltaic Solar Energy Conference, 3-7 September 2007, Milan, Italy, pp. 1231-1234, 2007, DOI: 10.1016/j.nantod.2014.04.013

Zhipeng Huang, Xuanxiong Zhang, Manfred Reiche, Lifeng Liu, Woo Lee, Tomohiro Shimizu, Stephan Senz, and Ulrich Gösele, Extended arrays of vertically aligned sub-10 nm diameter [100] Si nanowires by metal-assisted chemical etching, Nano Letters, vol. 8, No. 9, pp. 3045-3051, 2008 DOI: 10.1021/nl802324y

Zhipeng Huang, Nadine Geyer, Peter Werner, Johannes de Boor, Ulrich Gösele, Metal-Assisted Chemical Etching of silicon: A Review, Adv. Mater, vol.23, pp. 285–308, 2011 DOI: 10.1002/adma.201001784


Перелік посилань за IEEE 2006


  1. Chen, S., Yuan, R., Chai, Y. et “Electrochemical sensing of hydrogen peroxide using metal nanoparticles: a review” Microchim Acta vol. 180, p. 15., 2013 DOI: 10.1007/s00604-012-0904-4
  2. Yuan Zhang, “Decoration of ZnO nanowires with Pt nanoparticles and their improved gas sensing and photocatalytic performance” Nanotechnology, vol. 21, p. 285501, 2010 DOI: 10.1088/0957-4484/21/28/285501
  3. Luo, X., Morrin, A., Killard, Anthony J. and Smyth, Malcolm R., “Application of Nanoparticles in Electrochemical Sensors and Biosensors”. Electroanalysis, vol. 18, pp. 319–326, 2006 DOI: 10.1002/elan.200503415
  4. Wang, Q., Zheng, J. “Electrodeposition of silver nanoparticles on a zinc oxide film: improvement of amperometric sensing sensitivity and stability for hydrogen peroxide determination” Microchim Acta vol. 169, p.361, 2010 DOI: 10.1007/s00604-010-0356-7
  5. Wang, L., Zhu, H., Hou, H. “A novel hydrogen peroxide sensor based on Ag nanoparticles electrodeposited on chitosan-graphene oxide/cysteamine-modified gold electrode” J Solid State Electrochem, vol.16, p.1693, 2012 DOI: 10.1007/s10008-011-1576-4
  6. T. Jalkanen, J. Tuura, E. Makila, J. Salonen “Electro-optical porous silicon gas sensor with enhanced selectivity” Sensors and Actuators B vol.147, pp. 100–104, 2010 DOI: 10.1016/j.snb.2010.03.005
  7. M.V. Chursanova, L.P. Germash, V.O. Yukhymchuk, V.M. Dzhagan, I.A. Khodasevich, D. Cojoc “Optimization of porous silicon preparation technology for SERS applications” Applied Surface Science vol. 256, pp.3369–3373, 2010 DOI: 10.1016/j.apsusc.2009.12.036
  8. Han-Jung Kim, Young-You Kim, Ki-Won Lee “Multiparametric sensor based on DBR porous silicon for detection of ethanol gas” Current Applied Physics vol. 10 pp. 181 – 183, 2010, DOI: 10.1016/j.cap.2009.04.020
  9. Saakshi Dhanekar, S. S. Islam, T. Islam, A. K. Shukla, Harsh. “Organic vapour sensing by porous silicon: Influence of molecular kinetics in selectivity studies” Physica E, vol. 42, pp. 1648 – 1652, 2010 DOI: 10.1016/j.physe.2010.01.017
  10. J. Diana, V. Vrkoslav, I. Jelinek “Recognition enhancement of oxidized and methyl-10-undecenoate functionalized porous silicon in gas phase photoluminescence sensing” Sensors and Actuators B vol.147, pp. 406 – 410, 2010, DOI: 10.1016/j.snb.2010.03.073
  11. L. N. Acquaroli, R. Urteaga, R. R. Koropecki “Innovative design for optical porous silicon gas sensor” Sensors and Actuators B: Chemical, vol.149, is.1. pp. 189 – 193, 2010, DOI: 10.1016/j.snb.2010.05.065
  12. V. A. Skryshevsky “Basics of MIS-type gas sensors with thin nanoporous silicon” Electronics and Nanotechnology (ELNANO), 2014 IEEE 34th International Conference 15-18 April 2014 Kyiv. – pp. 78-82, 2014 DOI: 10.1109/ELNANO.2014.6873967
  13. Ali A. Ensafi, Fatemeh Rezaloo, B. Rezaei, Electrochemical sensor based on porous silicon/silver nanocomposite for the determination of hydrogen peroxide Sensors and Actuators B: Chemical, vol. 231, pp. 239-244, 2016, DOI: 10.1016/j.snb.2016.03.018
  14. Ensafi, M. Mokhtari Abarghoui, B. Rezaei, Electrochemical determination of hydrogen peroxide using copper/porous silicon based non-enzymatic sensor // Sensors and Actuators B: Chemical, vol. 196, pp. 398-405, 2014 DOI: 10.1016/j.snb.2014.02.028
  15. Al-Hardan, N.H.; Abdul Hamid, M.A.; Shamsudin, R.; AL-Khalqi, E.M.; Kar Keng, L.; Ahmed, N.M. “Electrochemical Hydrogen Peroxide Sensor Based on Macroporous Silicon” Sensors, vol.18, p.716, 2018 DOI: 10.3390/s18030716
  16. M. Dusheiko, V. Ilchenko, T. Obukhova and M. Stepanova, "Sensors on FET with porous silicon," 2017 IEEE 37th International Conference on Electronics and Nanotechnology (ELNANO), Kiev, 2017, pp. 162-164, 2017 DOI: 10.1109/ELNANO.2017.7939739
  17. O. Kutova, M. Dusheiko, T. Obukhova, V. Tymofeev, N. Maksimchuk, T. Borodinova “H2O2 sensor based on FET with active layer in substrate area” Sensor Electronics and Microsystem Technologies, vol 14, No 4, pp 5-12, 2017
  18. V. Estela-Lupis, T. Borodinova, I. Urkova “Extracellular biomineralization and gold and platinum nano- and microcrystallytes synthesis in polysaccharides wather solutions” in Colloid-chemical basis of nanoscience Kyiv: Akademperiodika, 2005.
  19. C. Chartier, S. Bastide, C. Levy-Clement “Metal-assisted wet chemical etching of crystalline silicon” Proceedings of the 22nd European Photovoltaic Solar Energy Conference, 3-7 September 2007, Milan, Italy, pp. 1231-1234, 2007, DOI: 10.1016/j.nantod.2014.04.013
  20. Zhipeng Huang, Xuanxiong Zhang, Manfred Reiche, Lifeng Liu, Woo Lee, Tomohiro Shimizu, Stephan Senz, and Ulrich Gösele, Extended arrays of vertically aligned sub-10 nm diameter [100] Si nanowires by metal-assisted chemical etching, Nano Letters, vol. 8, No. 9, pp. 3045-3051, 2008 DOI: 10.1021/nl802324y
  21. Zhipeng Huang, Nadine Geyer, Peter Werner, Johannes de Boor, Ulrich Gösele, Metal-Assisted Chemical Etching of silicon: A Review, Adv. Mater, vol.23, pp. 285–308, 2011 DOI: 10.1002/adma.201001784


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Copyright (c) 2018 Кутова О. Ю., Обухова Т. Ю., Душейко М. Г., Лобода Б. О., Бородінова Т. І., Ткач С.В.

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